J. Opt. Our investigation uses the film-interference transmittance spectrum in the computer calculation of thin-film thickness t and complex refractive index n*=n-ik. In fact, our customers show us new uses for our thin-film thickness measurement tools every day! G. A. Baratta and M. E. Palumbo Citation lists with outbound citation links are available to subscribers only. Appl. By using this site, you agree to our updated Privacy Policy and our Cookie Policy. Physical Sciences index Optics index: The reflection from a single-layer interference filter (or mirror) is calculated by use of Snell's law, the … Various dispersion equations of the finite-power-series type are used to obtain the best fit between transmittance measurements and calculations. or 24(12) 1788-1798 (1985), Haiming Wang Login to access OSA Member Subscription. Titanium oxide films of different thicknesses are studied, and a new approach to determine the film … For best results, use the separate Authors field to search for author names. By measuring light not visible to the human eye, films as thin as 1nm and as thick as 10mm can be measured. You do not have subscription access to this journal. Another Free-Software thin-film program is OpenFilters: OpenFilters offers multiple tools for the design and optimization of optical interference coatings, including refinement, the needle method, the step … The best-fit results for n(λ) and k(λ) are found to agree with dispersion relations that follow from a quantum theory of light absorption. Server-side code, i.e. Got a question about your thin-film measurement efforts? All Rights Reserved, Only if other resources available (images, video, datasets), • Use these formats for best results: Smith or J Smith, Journal of Optical Communications and Networking, Journal of the Optical Society of America A, Journal of the Optical Society of America B, Journal of Display Technology (2005-2016), Journal of the Optical Society of Korea (1997-2016), Journal of Optical Networking (2002-2009), Journal of the Optical Society of America (1917-1983), Conference on Lasers and Electro-Optics (CLEO), Conference on Lasers and Electro-Optics/Pacific Rim, Integrated Photonics Research, Silicon and Nanophotonics, Optical characterization of dielectric and semiconductor thin films by use of Calculator Code by Eric Perozziello, ©2001 Derived from C. Storment's Excel implementation of Stoney's Eqn. You do not have subscription access to this journal. Use these formats for best results: Smith or J Smith, Use a comma to separate multiple people: J Smith, RL Jones, Macarthur. Appl. Every program does the “forward problem” (given a material configuration, compute the optical properties), but only the programs marked RP also do the “reverse problem” out-of-the-box (given optical measurement data, guess the materials and thicknesses). 37(22) 5262-5270 (1998), Stephen Humphrey This website uses cookies to deliver some of our products and services as well as for analytics and to provide you a more personalized experience. A, © Copyright 2020 | The Optical Society. All rights reserved. You do not have subscription access to this journal. There are ways of determining the exact thin film thickness using an iterative scheme. © Copyright 2020 KLA Corporation. transmission data, Direct calculation of the optical constants for a thin film using a midpoint envelope, Determination of the optical constants of a thin film from transmittance measurements of a single film thickness, Determination of optical constants of absorbing crystalline thin films from reflectance and transmittance measurements with oblique incidence. Please send me additions and corrections and suggestions! Note: Author names will be searched in the keywords field, also, but that may find papers where the person is mentioned, rather than papers they authored. Appl. This new approach is based on the use of numerical optimization methods in transmittance-spectra fitting. Use quotation marks " " around specific phrases where you want the entire phrase only. it runs in your browser. Click here to see what's new.